Temperature Range: ambient to 200 degrees Celcius/ambient to 77 degrees Kelvin
Angle:
0 to 80 degrees
Interferometric Measurement
Equipment Capabilities
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Tropel 900
RTI's Tropel 900 is used to attain measurements of wafer flatness interferometrically.
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PMI Interferometer
This Phase Modulated Interferometer has the capability to measure film stress from changes in substrate flatness. |
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